发明名称 DICING APPARATUS, AND METHOD OF MANAGING THE SAME
摘要 PROBLEM TO BE SOLVED: To make monitoring of a dicing apparatus by an operator unnecessary by enabling recognition of an anomaly even if the operator is apart from the dicing apparatus. SOLUTION: The dicing apparatus is provided with an anomaly detection means 29a for detecting an anomaly of the apparatus and forms anomaly information, and a transmission means 29b for transmitting the anomaly information to the portable telephone set of the operator, to notify the operator of the content of the anomaly by transmitting thereof to the portable telephone set 3. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008112933(A) 申请公布日期 2008.05.15
申请号 JP20060296346 申请日期 2006.10.31
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 H01L21/301 主分类号 H01L21/301
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