VALVE UNIT AND FLUID TREATING APPARATUS WITH THE SAME

摘要

A valve unit and a fluid treating apparatus with the same are provided to reuse a substrate and to simply design a passage of fluid on the substrate by opening and closing a channel several times with one valve unit. A valve unit(40A) includes a valve material container(42A), a valve connection path(44A), a pair of drain chambers(46,47), and an energy source(50). The valve material container stores a valve material(V) including a phase transition material which is solid at a normal temperature but melted when absorbing energy. The valve connection path connects the valve material container and a channel(35) which forms a passage of fluid. The pair of drain chambers are installed at both sides of the valve connection path on the channel. The energy source supplies energy to at least a part of the valve material. The channel is closed by melting, moving, and re-hardening of the valve material when the energy is supplied from the energy valve to the valve material hardened inside the valve material container or the valve connection path. The channel is opened by discharging the valve material to the drain chambers when the energy is supplied to the valve material from the energy source.