Einrichtung zur Steuerung von in der Halbleiterindustrie vorgesehenen Fertigungsmaschinen

摘要

The control unit includes a SECS-interface for connecting to a SECS-interface of an allocated communication partner. A multiplexer (M) is connected between the SECS-interface (K1) of a production machine (FM) and the SECS-interface of the first communication partner (BT). An additional data path is set up through the multiplexer between the SECS-interface of the production machine and a second communication partner (PL). Preferably, further data paths can be set up via the multiplexer for additional units. The switching of the multiplexer (M) is carried out by the rules of a cooperative multitasking.