申请人 |
APPLIED MATERIALS, INC.;LAKSHMANAN, ANNAMALAI;NGUYEN, VU NT;PARK, SOHYUN;BALASUBRAMANIAN, GANESH;REITER, STEVEN;KIYOHARA, TSUTOMU;SCHMITT, FRANCIMAR;KIM, BOK HOEN |
发明人 |
LAKSHMANAN, ANNAMALAI;NGUYEN, VU NT;PARK, SOHYUN;BALASUBRAMANIAN, GANESH;REITER, STEVEN;KIYOHARA, TSUTOMU;SCHMITT, FRANCIMAR;KIM, BOK HOEN |