| 摘要 |
<P>PROBLEM TO BE SOLVED: To individually calculate changes in the refraction factor of synthetic quartz glass owing to its compaction and owing to its rarefaction. <P>SOLUTION: Laser light L output from an ArF excimer laser light source 1 passes through a beam reshaping optical system 2 with its energy adjusted by an ND filter 3, and further, is applied via an aperture 4 to a sample S, with its energy density measured by an energy monitor 5. A change Δn<SB>1</SB>in the refraction factor in a direction vertical to the polarization direction of the laser light L is equal to a change Δn<SB>c</SB>in the refraction factor owing to compaction since the change Δn<SB>1</SB>is subjected to only an effect owing to the compaction. Further, a change Δn<SB>2</SB>in the refraction factor in a direction parallel to the polarization direction of the laser light L is equal to what is obtained by adding the change Δn<SB>c</SB>to a change Δn<SB>r</SB>in the refraction factor owing to rarefaction since the change Δn<SB>2</SB>is subjected to both effects owing to compaction and owing to rarefaction. This provides Δn<SB>c</SB>= Δn<SB>1</SB>and Δn<SB>r</SB>= Δn<SB>2</SB>- Δn<SB>1</SB>. <P>COPYRIGHT: (C)2008,JPO&INPIT |
