| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor which is capable of preventing product quality from being reduced and a device from being damaged. SOLUTION: In a control program 40 which operates on a substrate processor 10, a recipe storage unit 408 and a parameter storage unit 410 constitute a data storage means for storing data in relation to control. When an authorized user is authenticated by authentication processing, the user performs data editing operation through an editing picture. A setting unit 406 accepts via a UI device 20 operation for editing data being stored by the data storage means. A time measuring unit 416 measures a time during the operation accepted by the setting unit 406 and outputs the measured time to an operation control unit 414. The operation control unit 414 prohibits acceptance of the operation for editing data in a case where the time measured by the time measuring unit 416 exceeds a predetermined time. COPYRIGHT: (C)2008,JPO&INPIT
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