| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce interference due to capacitance generated between power feeders for feeding a high-frequency power to voltage-applying electrodes, without increasing a space between the power feeders. <P>SOLUTION: The two voltage-applying electrodes 8 which are connected with each other through an exhaust gas block 11 are arranged between two lines of flexible substrates 1 which are transported in parallel, and a conductor plate 27 for reducing a high-frequency current flowing in between the feeders 26 for feeding the high-frequency power to each voltage-applying electrodes 8 is arranged between the feeders 26. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
