| 发明名称 |
METHOD AND APPARATUS FOR PROVIDING ACTIVE COMPLIANCE IN A PROBE CARD ASSEMBLY |
| 摘要 |
<p>A probe card assembly can comprise a first source of compliance and a second source of compliance. The probe card assembly can further comprise a controller, which can be configured to apportion a total compliance demand placed on the probe card assembly between the first source of compliance and the second source of compliance.</p> |
| 申请公布号 |
WO2008057897(A2) |
申请公布日期 |
2008.05.15 |
| 申请号 |
WO2007US83264 |
申请日期 |
2007.10.31 |
| 申请人 |
FORMFACTOR, INC.;BREINLINGER, KEITH J. |
发明人 |
BREINLINGER, KEITH J. |
| 分类号 |
G01R31/02 |
主分类号 |
G01R31/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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