| 摘要 |
An apparatus for driving lift pins and a device having the same for manufacturing an FPD(Flat Panel Display) are provided to change a layout structure without interference with peripheral elements in a lower space of a chamber by forming plural pin plates so that each lift pin is individually elevated. Plural lift pins(60) are arranged to pass through a substrate mounting unit. The lift pins elevate a substrate. A lower end of each lift pin is fixed on plural pin plates(80). Driving units are respectively connected to the pin plates with a link member(77) to move the pin plate up and down at a time. A vertical guide(85) guides an up-down movement of the pin plate. The driving unit includes a driving plate(75) and the plural link members. The driving plate moves up and down in a ball screw method. The link members are connected between the driving plate and each pin plate. The vertical guide includes a rack(87) and a pinion(86), which are respectively installed on the substrate mounting unit and on the pin plate, to guide the up-down movement of the pin plate by being incorporated with each other.
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