| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma source that enables to extract a low-energy high-current plasma flow suitable for manufacturing induction fullerenes, and a manufacturing method that allows large-quantity synthesis of induction fullerenes. <P>SOLUTION: A plasma generation part in a plasma source capable of controlling ion energy is composed of a metal plate 2, a heater 1, and a heater heating power source 6. A space potential setting electrode 3, an electron reflecting electrode 4, and an electron supplying electrode 5 are arranged in parallel with each other while being arranged almost parallel to the metal plate 2. A plasma generation power source 7 is connected between the metal plate 2 and the space potential setting electrode 3 while a voltage is applied between them so as to make the side of the space potential setting electrode 3 have a higher potential. With respect to a ground potential, a positive voltage is applied to the space potential setting electrode 3 by a power source 8, a negative voltage is applied to the electron reflecting electrode 4 by a power source 9, and a current is supplied to the electron supplying electrode 5 by a power source 10 so as to allow the electrode 5 to generate heat. <P>COPYRIGHT: (C)2008,JPO&INPIT |
