| 摘要 |
<p>A method of making a thin-film capacitor on a metal foil using a thick top electrode is provided to form a directly patterned electrode by using an economical screen printing method without requiring for a continuous process to form individual electrodes. A method of making a thin-film capacitor on a metal foil using a thick top electrode includes the steps of: a depositing step of depositing a conductive paste, a conductive tape, or a conductive slurry on a thin-film dielectric formed on the metal foil to form the thick top electrode(150); and a firing step of firing the conductive paste, the conductive tape, or the conductive slurry and the dielectric at a temperature of 500 to 1200°C to form the thick top electrode with a capacitance density of more than 0.5muF/cm^2(160). The depositing step includes a screen printing step when the conductive paste is used, a laminating step when the conductive tape is used, and a casting step when the conductive slurry is used.</p> |
