FINE PARTICLE COMPONENT ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a fine particle component analyzer capable of rapidly performing calibration even when the component of a fine particle of nano-meter size is analyzed.

SOLUTION: The fine particle component analyzer 110 includes a sampling device 111 for sampling atmosphere, an electrostatic classifier 112 for classifying and sending a fine particle 2 of nano-meter size, as a target particle diameter, from the sampling gas 1 sampled by the sampling device 111, a mass spectrometer 114 of a laser ionization flight time type for analyzing the component of the fine particle 2 from the classifier 112, and a calibration object producing device 10 that produces a calibration object 3 to which a defined amount of calibration component 3b is adhered to a metal core 3a of the fine particle with a target number of particles per unit volume and supplies it to the classifier 112.

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