| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical rotary encoder manufacturable easily, usable even in a high-temperature environment, and having high resolution. SOLUTION: A light source device 1 for collimating light (with a wavelengthλ) radiated from an LED is used. The collimated light having constant coherence enters a slit shutter having a gap G=nP<SP>2</SP>/λ(P is a slit pitch, and n is a natural number) between both slits, and thereby a Talbot image having a light intensity distribution which is the same as a periodical structure of the slit of an index slit plate 3 or which is acquired by inverting it appears on a main slit plate 4. COPYRIGHT: (C)2008,JPO&INPIT
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