| 摘要 |
An autofocus device, comprises: a stage for mounting a sample; an objective lens; a focusing unit driving stage or the objective lens in an optical axis direction in order to control the position relative to each other of the stage and the objective lens; a lighting unit onto the sample; a detection unit detecting an optical image; a projection state changing unit being provided in an optical path, changing a state of the optical image projected onto the detection unit; a first in-focus state determination unit determining an in-focus state of the sample on the basis of a detection result; and a first in-focus state adjustment unit controlling a position of the projection state changing unit such that a state in which the stage and the objective lens are held at prescribed positions under control of the driving unit is determined to be an in-focus state.
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