LOAD ROCK CHAMBER,申请号KR20060111130-传众专利搜索

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法人/股东/高管

发明名称	LOAD ROCK CHAMBER
摘要	A load lock chamber is provided to prevent the generation of particles by separating a door from a chamber through an elastic member when the door is opened. A chamber(100) has an entrance(101). A door(110) is installed on the outside of the chamber to open and shut the entrance. A driving apparatus(120) transfers driving force to the door to open and shut the entrance. An elastic member(200) is disposed between the driving apparatus and the door. The elastic member separates the door from the chamber when the door opens the entrance. The driving apparatus includes a power transfer member(122) and a motor(121). The power transfer member is connected to the door. The motor is connected to the power transfer member. The elastic member is disposed between the power transfer member and the door. The door has a coupling groove where the elastic member is inserted. The elastic member is a C-washer. The C-washer has a through hole(201).
申请公布号	KR20080042544(A)	申请公布日期	2008.05.15
申请号	KR20060111130	申请日期	2006.11.10
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KANG, YONG KEUN
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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