Verfahren zur Herstellung von Solarzellen aus amorphem Silizium mittels Naßätzen von Löchern oder Gräben durch Rückseitenelektroden und amorphes Silizium

摘要

A method of amorphous silicon solar cell manufacture comprises forming thin films of transparent electrode, amorphous silicon, and backside electrode, in that order, on a transparent substrate. An alkali resistant metal is used For the backside electrode. The backside electrode and the amorphous silicon layer are wet-etched, thereby opening holes or grooves that penetrate through these layers.