发明名称 |
BARRIER FILM FORMING METHOD |
摘要 |
<p>A barrier film consisting of a ZrB<SUB>2</SUB> film is formed by using a film forming device provided with a plasma generating means composed of a coaxial resonant cavity provided with a conductor arranged spaced apart from and around a non-metal pipe for introducing reaction gas, and a microwave supply circuit for exciting the above coaxial resonant cavity, wherein the plasma generating means is constituted such that the internal height of the coaxial resonant cavity is integral multiples of 1/2 of an exciting wavelength, and gas injected from one end of the non-metal pipe is excited by a microwave at a position not covered with the conductor of the non-metal pipe and is released from the other end in the form of plasma.</p> |
申请公布号 |
WO2008056742(A1) |
申请公布日期 |
2008.05.15 |
申请号 |
WO2007JP71720 |
申请日期 |
2007.11.08 |
申请人 |
ULVAC, INC.;HATANAKA, MASANOBU;ISHIKAWA, MICHIO;TSUMAGARI, KANAKO |
发明人 |
HATANAKA, MASANOBU;ISHIKAWA, MICHIO;TSUMAGARI, KANAKO |
分类号 |
H01L21/285;C23C16/38;H01L21/28 |
主分类号 |
H01L21/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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