| 摘要 |
<p>A method for producing a disc master in which a master is rotary driven at a constant linear speed and moved in plane at such a constant speed as ensuring a predetermined moving amount per revolution of the master in a predetermined radial direction, an electron beam is deflected in the plane movement direction of the master by a first deflection amount per revolution of the master on the surface of the master on exposure of each concentric data pattern at first through (n-1)th round of each of a plurality of tracks, the electron beam is deflected in the direction opposite to the plane movement direction of the master by a second deflection amount on the surface of the master upon completion of exposure of concentric data pattern at first through (n-1)th round, and the electron beam is deflected in the direction opposite to the plane movement direction of the master by a third deflection amount on the surface of the master upon completion of exposure of concentric data pattern at the n-th round such that the irradiating position of electron beam is located at the exposure starting position of the concentric circle at the first round of adjacent track.</p> |
