| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser light irradiation apparatus which can maintain the diameter of condensing spot of a laser light small even when the wave front shape of the laser light varies in the middle of laser light irradiation. <P>SOLUTION: A laser light irradiation apparatus 1 includes a laser light generating portion 10, a wave front shape adjusting portion 20, a branch portion 30, a light condensing portion 40, a wave front shape acquiring portion 50, a control portion 61, a point light source 70, and a reflecting mirror 80. The wave front shape of a reference laser light L<SB>S</SB>output from the point source 70 and passed through the light condensing portion 40 is acquired by the wave front shape acquiring portion 50. The wave front shape of a second laser light L<SB>2</SB>of a laser light L<SB>0</SB>output from the laser light generating portion 10 and branched into two by the branch portion 30 is acquired by the wave front shape acquiring portion 50. An added distortion given to the laser light L<SB>0</SB>at the time of reflection in the wave front shape adjusting portion 20 is controlled so that the irregularity of the wave front shape of the second laser light L<SB>2</SB>is inverted to the wave front shape of the reference laser light L<SB>S</SB>, thus the wave front shape of the laser light L<SB>0</SB>after the reflection is adjusted. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
