发明名称 SHEET PASTING DEVICE, AND SHEET PASTING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a sheet pasting device and a sheet pasting method that are suitable for pasting an adhesive sheet formed by intemittent cutting to a body to be pasted to. <P>SOLUTION: The pasting device uses an adhesive sheet S2 wherein an adhesive layer A is provided on its one side and that is formed by intermittent cuts 11 along an approximately closed loop-like trace with a specified spacing and a band-like sheet S having a teared part 12 formed in an unnecessary sheet S3. The adhesive sheet S2 is pressed down by a pressing roller 15 to paste it to a ring frame RF and a wafer W, and the band-like sheet S is expanded in the direction of width by a tearing means 18 so as to give a tearing force to the cut 11 and the contiguous teared part 12. Thus, the adhesive sheet S2 and the unnecessary sheet S3 are separated. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008112789(A) 申请公布日期 2008.05.15
申请号 JP20060293784 申请日期 2006.10.30
申请人 LINTEC CORP 发明人 YOSHIOKA TAKAHISA;SUGISHITA YOSHIAKI
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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