| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for conveying an object and a method for conveying an object which can prevent a failure caused by collision during conveyance. <P>SOLUTION: The apparatus for conveying an object is configured to hold a wafer holder 4, which is an object to be moved, by a retaining portion 15 and convey the object between a chip supply portion 1 and a magazine 9 toward a target position, wherein the retaining portion 15 for chucking the wafer holder 4 is connected to a rod 17a of an air cylinder 17 via an arm 16 and the air cylinder 17 is mounted on a bracket 14 moved by a movement means 11. If the wafer holder 4 collides with a foreign matter during conveyance, the retaining portion 15 moves away from a target position and the rod 17a moves in the projecting direction or the retracting direction so as to reduce shock at the time of collision, and a cylinder operation detection sensor 18 provided on the air cylinder 17 detects the collision to stop conveyance. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
