摘要 |
PROBLEM TO BE SOLVED: To provide a mask capable of forming a uniform thin film on a substrate, a deposition apparatus, and an organic electroluminescence display device. SOLUTION: The mask is equipped with first areas 31 and second areas 32 and covers the entire substrate. In each first area 31, a plurality of first apertures 311 are formed, provided that each of the first apertures 311 corresponds to any one of sub-pixel areas formed on the substrate. At least one second area is placed on each side of each first area in which the plurality of first apertures are formed. In each second area 32, a plurality of second apertures 312 are formed, provided that each of the second apertures 312 corresponds to any one of sub-pixel areas. COPYRIGHT: (C)2008,JPO&INPIT
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