发明名称 |
HYBRID LAYERS FOR USE IN COATINGS ON ELECTRONIC DEVICES OR OTHER ARTICLES |
摘要 |
A method for forming a coating over a surface is disclosed. The method comprises depositing over a surface, a hybrid layer comprising a mixture of a polymeric material and a non-polymeric material. The hybrid layer may have a single phase or comprise multiple phases. The hybrid layer is formed by chemical vapor deposition using a single source of precursor material. The chemical vapor deposition process may be plasma-enhanced and may be performed using a reactant gas. The precursor material may be an organo-silicon compound, such as a siloxane. The hybrid layer may comprise various types of polymeric materials, such as silicone polymers, and various types of non-polymeric materials, such as silicon oxides. By varying the reaction conditions, the wt% ratio of polymeric material to non-polymeric material may be adjusted. The hybrid layer may have various characteristics suitable for use with organic light-emitting devices, such as optical transparency, impermeability, and/or flexibility. |
申请公布号 |
WO2008057394(A1) |
申请公布日期 |
2008.05.15 |
申请号 |
WO2007US23098 |
申请日期 |
2007.10.31 |
申请人 |
THE TRUSTEES OF PRINCETON UNIVERSITY;WAGNER, SIGURD;MANDKLIK, PRASHANT |
发明人 |
WAGNER, SIGURD;MANDKLIK, PRASHANT |
分类号 |
C23C16/24;C23C16/02;C23C16/40;C23C30/00;H01L31/0224;H01L51/52 |
主分类号 |
C23C16/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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