SPUTTERING TARGET OF Li3PO4 AND METHOD FOR PRODUCING SAME

摘要

A method of forming a lithium orthophosphate sputter target or tile and resulting target material is presented. The target is fabricated from a pure lithium orthophosphate powder refined to a fine powder grain size. After steps of consolidation into a ceramic body, packaging and degassing, the ceramic body is densified to high density, and transformed into a stable single phase of pure lithium orthophosphate under sealed atmosphere. The lithium orthophosphate target is comprised of a single phase, and can preferably have a phase purity greater than 95% and a density of greater than 95%.