发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 A semiconductor device includes: a first element isolation film that is formed by a LOCOS oxidation method on a semiconductor substrate for isolating a first element region from other regions; a second element isolation film embedded in a groove formed in the semiconductor substrate for isolating a second element region from other regions; a first semiconductor element formed in the first element region; a second semiconductor element formed in the second element region; and a resistance element formed on the first element isolation film.
申请公布号 US2008111209(A1) 申请公布日期 2008.05.15
申请号 US20070924061 申请日期 2007.10.25
申请人 SEIKO EPSON CORPORATION 发明人 SHIN CHIHIRO
分类号 H01L29/00;H01L21/76 主分类号 H01L29/00
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