| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for simplifying astigmatism correcting work of a scanning type charged particle microscope. SOLUTION: The crossover 11 of a charged article beam 2 is provided between a charged article gun 1 and an objective lens 6, and an astigmatism correcting apparatus 15 is adjusted so that the locus of a microscope image moves while describing a perfect circle when the charged particle beam 2 is deflected to circle a conical surface along the generating line of a cone having the crossover as its vertex. COPYRIGHT: (C)2008,JPO&INPIT
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