| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical filter which can remarkably reduce deformation and breakage of an optical substrate during and after film deposition. SOLUTION: On the substrate 3 which has 0.1 mm thickness and made of polyethylene terephthalate film, an SiO<SB>2</SB>film 41 and a TiO<SB>2</SB>film 42 are alternately stacked to produce the optical filter composed of 43 layers and shields ultraviolet rays and near infrared rays. Polyethylene terephthalate has bending elasticity modulus of about 4000 MPa and the optical filter produced by depositing a film on the polyethylene terephthalate film has≤1% of transmittance in an infrared wavelength region,≤1% of transmittance in an ultraviolet wavelength region and≥90% of transmittance in a visible wavelength region. COPYRIGHT: (C)2008,JPO&INPIT |
