| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus which can properly process a substrate on transfer. SOLUTION: The substrate transfer apparatus 50 includes a fork support 51 capable of moving a first substrate storage unit 20 and a second substrate storage unit 30, and forks 60 and 65 which are supported movably on the fork support. The forks support a substrate transferred from the first substrate storage unit to the second substrate storage unit at a first support position, and support a substrate transferred from the second substrate storage unit to the first substrate storage unit at a second support position different from the first support position. The forks supporting the substrate at the first support position are located at a first standby position during the move of the fork support, and the forks supporting the substrate at the second support position are located at a second standby position different from the first standby position during the move of the fork support. COPYRIGHT: (C)2008,JPO&INPIT
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