| 摘要 |
A lift pin of a plasma processing apparatus is provided to restrain the generation of metal particles by using a synthetic resin material for removing friction due to a contact between metals. A base member(60) is prepared on a plasma processing apparatus to elevate a substrate up and down. The base member is extended from a driving plate. An insert slot(62) is formed on the center of the front of the base member. A through hole(72), which has a diameter corresponding to the insert slot of the base member, is formed on a middle member(70) made of a synthetic resin. A contact member(80) is comprised of an inserting unit(82), and a contact unit(84), which are approximately T-shape. The inserting unit is inserted into the through hole of the middle member and the insert slot of the base member. The contact unit is contacted to a rear of a substrate. The base member, the middle member, and the contact unit of the contact member have the same diameters.
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