| 摘要 |
An electrostatic chuck is provided to discharge easily electric charges accumulated therein by extending a grounding surface by arranging a buffer member between a base plate and an electrostatic sheet. An electrostatic chuck(10) includes a base plate(11), a buffer member(20), and an electrostatic sheet(30). The buffer member is stacked on the base plate and includes a conductive material. The electrostatic sheet is stacked on the buffer member. An electrode(35) is formed in the inside of the electrostatic sheet in order to generate electrostatic force. The electrostatic sheet includes a polyimide insulating film. The buffer member includes a conductive rubber. The conductive rubber includes carbon. The electrode is formed with a bipolar electrode.
|
