发明名称 |
Method for manufacturing semiconductor device |
摘要 |
A layer including a semiconductor film is formed over a glass substrate and is heated. A thermal expansion coefficient of the glass substrate is greater than 6 × 10 -7 /°C and less than or equal to 38 × 10 -7 /°C. The heated layer including the semiconductor film is irradiated with a pulsed ultraviolet laser beam having a width of less than or equal to 100 µm, a ratio of width to length of 1:500 or more, and a full width at half maximum of the laser beam profile of less than or equal to 50 µm, so that a crystalline semiconductor film is formed. As the layer including the semiconductor film formed over the glass substrate, a layer whose total stress after heating is -500 N/m to +50 N/m, inclusive is formed. |
申请公布号 |
EP1921667(A2) |
申请公布日期 |
2008.05.14 |
申请号 |
EP20070021213 |
申请日期 |
2007.10.30 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
SHIMOMURA, AKIHISA;MIYAIRI, HIDEKAZU;JINBO, YASUHIRO |
分类号 |
H01L21/20;B23K26/073;H01L21/02;H01L21/268;H01L27/12 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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