发明名称 |
TRANSFER APPARATUS USING ELECTROSTATIC ATTRACTION BOARD |
摘要 |
An electrostatic adsorbing/conveying device capable of performing high-speed conveyance, capable of making constant a state of contact between an electrostatic adsorbing plate and an article to be conveyed such as film, and not causing any fine defect on the article to be conveyed, is provided inexpensively.
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申请公布号 |
EP1921033(A1) |
申请公布日期 |
2008.05.14 |
申请号 |
EP20060796512 |
申请日期 |
2006.08.11 |
申请人 |
SEIREN CO., LTD. |
发明人 |
ARAIE, HIDEMASA;TAKASHIMA, KENICHI;TAKAGI, SUSUMU |
分类号 |
B65H5/00;B65H3/18 |
主分类号 |
B65H5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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