Piezoelectric/electrostrictive film device, and manufacturing method of the device

摘要

There is disclosed a piezoelectric/electrostrictive film device which has a flexural displacement and durability equal to or more than those of a related-art piezoelectric/electrostrictive film device and which has a remarkably high resonance frequency and which is superior in high-speed response. The piezoelectric/electrostrictive film device comprises: a substrate (44) formed of ceramic; and a piezoelectric/electrostrictive operation portion (78) including a lower electrode (77), piezoelectric/electrostrictive layer (73), and upper electrode (75) which are successively stacked on the substrate and including a projecting end of the piezoelectric/electrostrictive layer with which an upper surface of the lower electrode and a lower surface of the upper electrode are coated, and a projecting portion (79) of the piezoelectric/electrostrictive layer comprises a coupling member (70) constituted of a hybrid material in which inorganic particles are scattered in a matrix of a polymer compound, and is coupled to the substrate.