Elongated nano-structures and related devices

摘要

A method of making a field emission device comprising applying a dielectric layer to a substrate, applying a conductive layer to the dielectric layer and forming at least one cavity in the conductive layer and the dielectric layer thus exposing the substrate. Thereafter growing a nanorod in the cavity by applying at least one catalyst particle within the cavity and exposing the catalyst particle and a portion of the substrate to a metal vapour and an oxidising gas to form an oxide nanorod. The oxide nanorod is subsequently exposed to a carbon containing vapour to carburize the nanorod and the catalyst particle is removed by etching for example. The catalyst particle can be applied as a pattern.