发明名称 APPARATUS FOR TESTING A IMAGE SENSOR
摘要 An apparatus for testing an image sensor is provided to selectively test the required number of chips and to improve test reliability by controlling a region of light incident into the image sensor according to the number of the chips for testing. A light source(110) irradiates light to an image sensor(170). A diffusion filter(140) is arranged between the light source and the image sensor. The diffusion filter controls an angle of the light incident into the image sensor. A probe card(120) has a probe(130) contacted to a pad of the image sensor. The probe card tests photoelectric transformation characteristic of the image sensor according to the light. A support(150) supports a side of the diffusion filter. The support fixes the diffusion filter to the probe card. A fly-eye lens array(160) is formed between the light source and the diffusion filter. The fly-eye lens array makes intensity of the light irradiated from the light source uniform.
申请公布号 KR20080041792(A) 申请公布日期 2008.05.14
申请号 KR20060109832 申请日期 2006.11.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KO, JUN PYO
分类号 H01L21/66;H01L27/146 主分类号 H01L21/66
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