发明名称 |
APPARATUS FOR TESTING A IMAGE SENSOR |
摘要 |
An apparatus for testing an image sensor is provided to selectively test the required number of chips and to improve test reliability by controlling a region of light incident into the image sensor according to the number of the chips for testing. A light source(110) irradiates light to an image sensor(170). A diffusion filter(140) is arranged between the light source and the image sensor. The diffusion filter controls an angle of the light incident into the image sensor. A probe card(120) has a probe(130) contacted to a pad of the image sensor. The probe card tests photoelectric transformation characteristic of the image sensor according to the light. A support(150) supports a side of the diffusion filter. The support fixes the diffusion filter to the probe card. A fly-eye lens array(160) is formed between the light source and the diffusion filter. The fly-eye lens array makes intensity of the light irradiated from the light source uniform.
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申请公布号 |
KR20080041792(A) |
申请公布日期 |
2008.05.14 |
申请号 |
KR20060109832 |
申请日期 |
2006.11.08 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KO, JUN PYO |
分类号 |
H01L21/66;H01L27/146 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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