Integrated sensor including a pressure sensor and a temperature sensor

摘要

An integrated sensor includes a pressure sensor element integrated with a temperature sensor element (109). When the sensor is attached to an object of attachment (200) at a mounting position at an angle of ¸ rq degrees with respect to an ideal attachment position, in which a central axis (c) of at sensor element body (109a) of the temperature sensor element (109) is disposed perpendicular to a direction in which a gas to be measured passes through the object of attachment, an inclination angle ¸ pos at which the central axis (c) of the sensor element body (109a) is inclined at the mounting position with respect to a position of the central axis (c) of the sensor element body (109a) at the ideal attachment position is set according to the following equation: ¸ rq - ¸ allow ‰ ¸ pos ‰ ( ¸ rq + ¸ allow )
wherein ¸ allow represents an allowable angle at which an allowable response speed of the temperature sensor element (109) is obtained.