发明名称 PHOTO-ACID GENERATOR, PHOTORESIST COMPOSITION INCLUDING THE SAME AND METHOD OF FORMING PATTERN
摘要 <p>In a photoresist composition and a method of forming a pattern using the same, the photoresist composition includes about 0.1 to about 0.5 percent by weight of a photoacid generator including a positively charged sulfonium ion and a negatively charged sulfonate ion having a hydrophilic carboxylic group, about 4 to about 10 percent by weight of a resin, and a solvent.</p>
申请公布号 KR100829615(B1) 申请公布日期 2008.05.14
申请号 KR20060099014 申请日期 2006.10.11
申请人 发明人
分类号 G03F7/004 主分类号 G03F7/004
代理机构 代理人
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