发明名称 Charged particle beam device
摘要 A charged particle beam device (10) is provided, including a computer operable in response to commands entered by a user of the device to control the device, wherein the device further includes an interface (24) operable to cause data from the computer in the form of short message service (SMS) and/or multimedia message service (MMS) messages to be transmitted to a mobile device (16, 18, 20) via a mobile telephone network (14). The charged particle beam device (10) is operable to receive commands in the form of SMS and/or MMS messages from the mobile telephone (14), and to cause the computer to execute the commands. The interface (24) includes a user interface operable to enable a user of the device to select operating parameters and/or conditions of the device from a list of operating parameters and/or conditions, set values of each selected operating parameter or condition in response to which the interface will transmit an SMS message to a mobile device, and for each selected operating parameter or condition, enter an identification, typically a telephone number, of the mobile device to which the SMS message will be transmitted.
申请公布号 EP1808882(A3) 申请公布日期 2008.05.14
申请号 EP20070250050 申请日期 2007.01.08
申请人 CARL ZEISS SMT LIMITED 发明人 STUBBS, TIM ROBERT
分类号 H01J37/26 主分类号 H01J37/26
代理机构 代理人
主权项
地址