发明名称 |
METHOD FOR THE PRODUCTION OF A MULTILAYER ELECTROSTATIC LENS ARRAY |
摘要 |
The invention relates to a method for the production of a multilayer electrostatic lens arrangement with at least one lens electrode in general, a method for the production of a phase plate in particular as well as the lens arrangement, the phase plate and a transmission electron microscope with the phase plate. The lens arrangement or the phase plate is produced from a thin self-supporting silicon nitride membrane which is fixed in a macroscopic chip with deposition of further layers. The central bore as well as the aperture opening are milled out by means of an ion beam. |
申请公布号 |
EP1920453(A2) |
申请公布日期 |
2008.05.14 |
申请号 |
EP20060776643 |
申请日期 |
2006.08.05 |
申请人 |
UNIVERSITAET KARLSRUHE |
发明人 |
GERTHSEN, DAGMAR;PEREZ-WILLARD, FABIAN;SCHULTHEISS, KATRIN |
分类号 |
H01J37/26;H01J37/12 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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