Substrate support lift pin,申请号US20060256744F-传众专利搜索

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发明名称	Substrate support lift pin
摘要
申请公布号	USD568914(S1)	申请公布日期	2008.05.13
申请号	US20060256744F	申请日期	2006.03.24
申请人	APPLIED MATERIALS, INC.	发明人	OR DAVID T.;KOAI KEITH K.;TAKAHAMA HIROYUKI;ITO TAKAHIRO;OTA KOJI;SATO HIROSHI
分类号		主分类号
代理机构		代理人
主权项
地址

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