发明名称 Parallel-beam scanning for surface patterning of materials
摘要 A system and method for parallel-beam scanning a surface. An energetic beam source emits an energetic collimated beam which is received by an optical device, comprising: one or more optical media, operable to receive the emitted beam, such as two pairs of coordinated mirrors or a right prism, and at least one actuator coupled to the one or more optical media, and operable to rotate each of the one or more optical media around a respective axis to perform a parallel displacement of the beam in a respective direction, wherein the respective direction, the beam, and the respective axis are mutually orthogonal. The optical device is operable to direct the beam to illuminate a sequence of specified regions of a surface.
申请公布号 US7371596(B2) 申请公布日期 2008.05.13
申请号 US20040027579 申请日期 2004.12.30
申请人 SEMICUBE, INC. 发明人 WARNER, JR. RAYMOND M.;MILLAR, LEGAL REPRESENTATIVE LYNN;MACCRISKEN JOHN E.;WILLIAMS MARK S.
分类号 H01L21/00 主分类号 H01L21/00
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