发明名称 |
CHEMICALLY INERT FLOW CONTROLLER WITH NON-CONTAMINATING BODY |
摘要 |
<p>A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional area to thereby restrict the flow of fluid within the conduit allowing for reliable flow measurement. An integrated circuit or controller may becoupled to the control valve and also coupled to the pressure sensors by a lead structure including signal conductors surrounded by a Faraday cage, and a chemically inert housing coupled to the unitary controller body enclosing the control valve and the pressure sensors.</p> |
申请公布号 |
KR20080041644(A) |
申请公布日期 |
2008.05.13 |
申请号 |
KR20087003186 |
申请日期 |
2006.07.10 |
申请人 |
ENTEGRIS, INC. |
发明人 |
CHINNOCK ROBERT T.;MEACHAM CHARLES;MILLER CLIFFORD |
分类号 |
F16K17/26;G01F1/37;G01L7/00 |
主分类号 |
F16K17/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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