发明名称 Method for reducing diffusion through ferromagnetic materials
摘要 A method and apparatus are disclosed for inhibiting diffusion of mobile atoms from an antiferromagnetic layer toward a tunnel oxide layer and through a ferromagnetic layer which is pinned by the antiferromagnetic layer. Diffusion of the mobile atoms is inhibited by an oxide layer provided between the anti-ferromagnetic layer and the ferromagnetic layer. Alternatively, the ferromagnetic layer can have boron atoms located on or in the layer to fill interstices.
申请公布号 US7371587(B2) 申请公布日期 2008.05.13
申请号 US20040963579 申请日期 2004.10.14
申请人 MICRON TECHNOLOGY, INC. 发明人 DREWES JOEL A.;GAFRON TERRY
分类号 H01L21/00;H01F10/32;H01F41/30 主分类号 H01L21/00
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