发明名称 TECHNIQUE FOR FORMING RECESSED STRAINED DRAIN/SOURCE REGIONS IN NMOS AND PMOS TRANSISTORS
摘要 By forming a strained semiconductor layer (117, 217) in a PMOS transistor (110, 210), a corresponding compressively strained channel region (11 IA) may be achieved, while, on the other hand, a corresponding strain in the NMOS transistor (120, 220) may be relaxed. Due to the reduced junction resistance caused by the reduced band gap of silicon/germanium in the NMOS transistor (120, 220), an overall performance gain is accomplished, wherein, particularly in partially depleted SOI devices, the deleterious floating body effect is also reduced, due to the increased leakage currents generated by the silicon/germanium layer (117, 127, 217, 227) in the PMOS (110, 210) and NMOS transistor (120, 220).
申请公布号 KR20080041737(A) 申请公布日期 2008.05.13
申请号 KR20087007854 申请日期 2006.08.23
申请人 ADVANCED MICRO DEVICES, INC. 发明人 HOENTSCHEL JAN;WEI ANDY;KAMMLER THORSTEN;RAAB MICHAEL
分类号 H01L21/265;H01L27/092 主分类号 H01L21/265
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