Fabrication method of a high gradient-field recording head for perpendicular magnetic recording

摘要

A thin film magnetic head for perpendicular recording of a single-pole type has a flux enhanced part and a flux enhanced end arranged on a leading side of the main pole in parallel with the cross track direction. The side surface of the main pole intersecting the cross track direction is arranged on the track center side perpendicular to the track width. The field gradient of a perpendicular magnetic field on the trailing side of the main pole and near both ends of the track is made steep to realize a higher areal recording density. The head is fabricated by forming a first resist pattern on an inorganic insulating layer. A slope is formed on the inorganic insulating layer with the resist pattern as a mask. A second resist pattern is then formed on the inorganic insulating layer to form a magnetic layer on the inorganic insulating layer.