| 发明名称 |
Substrate handling system |
| 摘要 |
A substrate handling system and method in which an air chuck produces a film of air between the substrate and the air chuck, a magnetic chuck attracts the substrate to the air chuck, and an actuator subsystem moves the magnetic chuck closer to and away from the air chuck to alternately pick up a substrate and release the substrate.
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| 申请公布号 |
US7371287(B2) |
申请公布日期 |
2008.05.13 |
| 申请号 |
US20040837842 |
申请日期 |
2004.05.03 |
| 申请人 |
PERKINELMER, INC. |
发明人 |
SHAVER NORMAN L.;ELLIS TIMOTHY A.;HILL DAVID R. |
| 分类号 |
C23C16/00;B25J;B41C1/00;B41C1/05;B65H3/16;B65H5/04;C23F1/00;H01L21/306 |
主分类号 |
C23C16/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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