发明名称 Semiconductor device including MOSFET and isolation region for isolating the MOSFET
摘要 A semiconductor device comprises a semiconductor substrate, a MOSFET including a double gate structure provided on the semiconductor substrate, and an isolation region for isolating the MOSFET from other elements comprising a trench provided on the surface of the semiconductor substrate and an insulator provided in the trench, a part of the isolation region in the trench around the MOSFET having a bottom deeper than other part of the isolation region.
申请公布号 US7372086(B2) 申请公布日期 2008.05.13
申请号 US20040820182 申请日期 2004.04.08
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SATO TSUTOMU;MIZUSHIMA ICHIRO
分类号 H01L27/12;H01L29/78;H01L21/336;H01L29/423;H01L29/786 主分类号 H01L27/12
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