PROCESS FOR PREPARING PLASTIC SUBSTRATE

摘要

A method for fabricating a plastic substrate is provided to improve cohesion of a plastic substrate and an inorganic thin film by adjusting the deposition temperature of plasma. A complex inorganic precursor including hydrogen carbon and reaction gas are deposited on one or both surfaces of a transparent plastic base film(15) to form an inorganic thin film by a plasma chemical deposition method. The process for forming the inorganic thin film is performed in a condition that the deposition temperature in a plasma chamber is increased. The deposition temperature can range from 10 °C to 220 °C, and the deposition temperature increases continuously or discontinuously.