| 摘要 |
FIELD: measuring techniques. ^ SUBSTANCE: detector element of the capacitance pressure sensor for liquid and gaseous media is in the form of fixed electrode, dielectric layer and moveable electrode, all on substrate layer. The moveable electrode is in the form of thin film membrane fixed on dielectric layer which is in the form of an X-ray sensitive film with cavities formed from deep X-ray lithography. The manufacturing technique for such an element involves depositing the fixed electrode, dielectric layer and moveable electrode on a substrate layer. Using deep X-ray lithography, cavities are formed in the X-ray sensitive dielectric layer, the moveable electrode in the form of a thin film membrane is sealed onto the dielectric. ^ EFFECT: simplification of construction of the detector element of the pressure sensor; increased manufacturability; increased accuracy in pressure measurement. ^ 6 cl, 7 dwg |
