| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus capable of modifying the inside surface of a hole in a body to be irradiated by electron beam irradiation, as a surface modification apparatus converting a low pressure ionized gas in a housing into plasma and irradiating an object with an electron beam from a cathode electrode. <P>SOLUTION: A cathode electrode generating the pulse of an electron beam and emitting the same is fitted to the main shaft projecting edge of the modification apparatus while magnets are placed side by side in the vicinity thereof, and the pulse of an electron beam is generated in a such state that the outside surface of the cathode electrode fitted with the main shaft projecting edge is inserted into the hole to be modified as the body to be irradiated so as to be opposite to the inside surface of the hole. <P>COPYRIGHT: (C)2008,JPO&INPIT |
